Allow modelling of manufacturer fact sheets or calibration data

often, a tool comes with a list of "nominal" attributes by the manufacturer (Datenblatt), and also very often, scientists calibrate their devices.

It would be nice to not only model these as file objects that are the input of a processing step, but as actual parameter sets that can be referenced on their own and are explicitely part of the RDF graph.

An option would be to add some kind of "parameter set", along with "has paramter set" as an attribute for tool.